Corner lot/Matrix lot的确定方法
一列出设计敏感器件清单

–设计芯片中供应的“工艺器件”

•如晶体管、电阻器、电容器和一些分外器件
–,紧张器件的变革影响
参数估计(定性)
•参数:
–电阻器:Rsh值和匹配
–晶体管:Vt值和匹配、Ioff和Isat电流
–电容器:值
–整体泄电
2。根据芯片设计敏感性剖析和紧张工艺过程步骤(模块)的创建corner lot/matrix lot table
3。工厂一样平常对每个工艺一样平常有标准的Corn lot/Matrix lot split table,可以作为参考。
Approach to determine corner/matrix lots
1. Listing of design sensitivities
– Designers use the “devices” available in the product
• Like transistors, resistors, capacitors, and some specials
– For the main devices the effect of variations in the main
parameters is estimated (qualitatively)
• Parameters:
– resistors : Rsh value&matching
– Transistors: Vt value& matching , Ioff and Isat currents
– Capacitors: value
– Overall leakage
2. Create matrix of main process steps (modules)
and their effect on the main devices
3. Prioritise on the possible process variations
corner lot/Maxtrix lot split table
design sensitivity analsys table










