分步重复系统 step-and-repeat system
显影 development
线宽 linewidth
去胶 stripping of photoresist
氧化去胶 removing of photoresist by oxidation
等离子［体］去胶 removing of photoresist by plasma
刻蚀 etching
干法刻蚀 dry etching
反应离子刻蚀 reactive ion etching, RIE
各向同性刻蚀 isotropic etching
各向异性刻蚀 anisotropic etching
反应溅射刻蚀 reactive sputter etching
离子铣 ion beam milling，又称“离子磨削”。
等离子［体］刻蚀 plasma etching
钻蚀 undercutting
剥离技能 lift-off technology，又称“浮脱工艺”。
终点监测 endpoint monitoring
金属化 metallization
互连 interconnection
多层金属化 multilevel metallization
电迁徙 electromigration
回流 reflow
磷硅玻璃 phosphorosilicate glass
硼磷硅玻璃 boron-phosphorosilicate glass
钝化工艺 passivation technology
多层介质钝化 multilayer dielectric passivation
划片 scribing
电子束切片 electron beam slicing
烧结 sintering
印压 indentation
热压焊 thermocompression bonding
热超声焊 thermosonic bonding
冷焊 cold welding
点焊 spot welding
球焊 ball bonding
楔焊 wedge bonding
内引线焊接 inner lead bonding
外引线焊接 outer lead bonding
梁式引线 beam lead
装架工艺 mounting technology
附着 adhesion
封装 packaging
金属封装 metallic packaging
陶瓷封装 ceramic packaging
扁平封装 flat packaging
塑封 plastic package
玻璃封装 glass packaging
微封装 micropackaging，又称“微组装”。
管壳 package
管芯 die
引线键合 lead bonding
引线框式键合 lead frame bonding
带式自动键合 tape automated bonding, TAB
激光键合 laser bonding
超声键合 ultrasonic bonding
红外键合 infrared bonding
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